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MEMS Differential Pressure Sensors

MEMS Differential Pressure Sensors

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MinebeaMitsumi is one of few companies that offer two distinctly different technologies for differential pressure measurement. We recognize that each application has its own unique requirements and we strive to provide our customers the best technology to meet their needs. MinebeaMitsumi offers our digital differential pressure sensors in both MEMS Piezo Resistive and MEMS thermal flow measurement technologies to cover a wide range of applications.
Features
  • Digital I2C with 24 Bit digital resolution
  • Resistant to contamination
  • Linearlized and temperature compensated
  • Ultra-high resolution and large dynamic range
  • RoHS and REACH compliant
Applications
  • CPAP flow measurement
  • HVAC damper control (VAV)
  • Refrigerator evaporator ice buildup
  • Fan flow monitoring
  • Burner modulation
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Function
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Operating Voltage
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Electrical Interface
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Max Digital Bit
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Operating Temperature
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Min Range
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Max Range
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Span Accuracy
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Zero point accuracy
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Max Resopnse Time
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Length
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Width
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Technology
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Span Accuracy
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Total Error
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Effective Resolution at fastest sampling
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Effective Resolution at slowest sampling
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Fastest Sampling Time
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