We combined MEMS PRT technology with a metal flexural structure to create a simple, reliable and cost effective sensor. The MMS101 utilizes six analog front end (AFE) ICs and one MEMS PRT dies providing digital SPI interface fully calibrated output. Correction coefficients used for matrix operation (removal of interference components from other axes) are stored in the AFE IC memory, and can be read prior to the start of measurement which eliminates the need for users to control the sensor and coefficients for correction. Built-in linear regulators (LDO) reduce noise to provide high resolution signals. Weighing only 3 grams and having a diameter of 9.6 mm, the MMS101 is suitable for force (as low as 0.04 Newton) and torque measurements within the fingertips of robotic hands.

The MMS101 is a fully integrated, calibrated, and temperature-compensated 6-axis force/torque sensor. Due to its integrated components, the sensor generates a small internal thermal load. When an external force is applied without proper mounting, thermal conditions can shift, causing output drift until equilibrium is reached. Proper mounting increases thermal mass and stability, reducing these effects.

To evaluate this behavior, comparative tests were conducted to measure Z-axis response under proper and improper mounting conditions. Loads were applied using both a roll of solder and a plumb weight. In each case, the sensor was tested when securely mounted on both ends and when mounted from only one end.

The results show that improper mounting leads to unstable output and continuous drift in the Z-axis. In contrast, when the sensor is properly mounted, the output remains stable and repeatable, with response times of only a few seconds during load application and removal.

Experiment 1